Influence of IBED parameters on the composition and structure of titanium oxide films deposited on LTI-carbon
文献类型：期刊论文
| 作者 | Wang, XH ; Zhang, F ; Li, CR ; Zheng, ZH ; Chen, LH ; Wang, HM ; Liu, XH |
| 刊名 | MATERIALS LETTERS
 |
| 出版日期 | 2000 |
| 卷号 | 45期号:1页码:1-5 |
| 关键词 | BEAM-ENHANCED DEPOSITION THIN-FILMS GROWTH |
| ISSN号 | 0167-577X |
| 通讯作者 | Wang, XH, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Materials Science, Multidisciplinary; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95781]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, XH,Zhang, F,Li, CR,et al. Influence of IBED parameters on the composition and structure of titanium oxide films deposited on LTI-carbon[J]. MATERIALS LETTERS,2000,45(1):1-5. |
| APA | Wang, XH.,Zhang, F.,Li, CR.,Zheng, ZH.,Chen, LH.,...&Liu, XH.(2000).Influence of IBED parameters on the composition and structure of titanium oxide films deposited on LTI-carbon.MATERIALS LETTERS,45(1),1-5. |
| MLA | Wang, XH,et al."Influence of IBED parameters on the composition and structure of titanium oxide films deposited on LTI-carbon".MATERIALS LETTERS 45.1(2000):1-5. |
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