Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm
文献类型：期刊论文
| 作者 | Chen, ZY ; Zhao, JP |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2000 |
| 卷号 | 87期号:9页码:4268-4273 |
| 关键词 | DIAMOND-LIKE-CARBON FILTERED CATHODIC ARC TA-C FILMS THIN-FILMS SUBPLANTATION MODEL COMPRESSIVE-STRESS THERMAL-STABILITY ATOMIC-STRUCTURE ION ENERGY DEPOSITION |
| ISSN号 | 0021-8979 |
| 通讯作者 | Chen, ZY, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China |
| 学科主题 | Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95786]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Chen, ZY,Zhao, JP. Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm[J]. JOURNAL OF APPLIED PHYSICS,2000,87(9):4268-4273. |
| APA | Chen, ZY,&Zhao, JP.(2000).Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm.JOURNAL OF APPLIED PHYSICS,87(9),4268-4273. |
| MLA | Chen, ZY,et al."Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm".JOURNAL OF APPLIED PHYSICS 87.9(2000):4268-4273. |
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