XTEM study of Ni gettering to H-implantation-induced nanocavities in SIMOX
文献类型：期刊论文
| 作者 | Zhang, M ; Liu, WL ; Duo, XZ ; An, ZH ; Lin, CL ; Chu, PK ; Scholz, R |
| 刊名 | 2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS
 |
| 出版日期 | 2000 |
| 页码 | 281-284 |
| 关键词 | CAVITIES SILICON SEPARATION |
| 通讯作者 | Zhang, M, Chinese Acad Sci, Shanghai Inst Met, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China |
| 学科主题 | Computer Science, Hardware & Architecture; Engineering, Electrical & Electronic |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95835]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, M,Liu, WL,Duo, XZ,et al. XTEM study of Ni gettering to H-implantation-induced nanocavities in SIMOX[J]. 2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS,2000:281-284. |
| APA | Zhang, M.,Liu, WL.,Duo, XZ.,An, ZH.,Lin, CL.,...&Scholz, R.(2000).XTEM study of Ni gettering to H-implantation-induced nanocavities in SIMOX.2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS,281-284. |
| MLA | Zhang, M,et al."XTEM study of Ni gettering to H-implantation-induced nanocavities in SIMOX".2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS (2000):281-284. |
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