Investigation and modeling of the infrared optical properties of direct current sputtered SiC films on silicon
文献类型：期刊论文
| 作者 | Lei,YM ; Yu,YH ; Cheng,LL ; Sundaraval,B ; Luo,EZ ; Ren,CX ; Zou,SC ; Wong,SP ; Chen,DH ; Wilson,IH |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2000 |
| 卷号 | 88期号:5页码:3053-3058 |
| ISSN号 | 0021-8979 |
| 关键词 | 3C-SIC FILMS THIN-FILMS GROWTH CARBON PRESSURE |
| 通讯作者 | Lei, YM, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Physics ; Applied |
| 收录类别 | SCI |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95842]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Lei,YM,Yu,YH,Cheng,LL,et al. Investigation and modeling of the infrared optical properties of direct current sputtered SiC films on silicon[J]. JOURNAL OF APPLIED PHYSICS,2000,88(5):3053-3058. |
| APA | Lei,YM.,Yu,YH.,Cheng,LL.,Sundaraval,B.,Luo,EZ.,...&Wilson,IH.(2000).Investigation and modeling of the infrared optical properties of direct current sputtered SiC films on silicon.JOURNAL OF APPLIED PHYSICS,88(5),3053-3058. |
| MLA | Lei,YM,et al."Investigation and modeling of the infrared optical properties of direct current sputtered SiC films on silicon".JOURNAL OF APPLIED PHYSICS 88.5(2000):3053-3058. |
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