Nickel precipitation at nanocavities in separation by implantation of oxygen
文献类型：期刊论文
| 作者 | Zhang, M ; Zeng, XC ; Chu, PK ; Scholz, R ; Lin, CL |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
 |
| 出版日期 | 2000 |
| 卷号 | 18期号:5页码:2249-2253 |
| 关键词 | IMMERSION ION-IMPLANTATION INDUCED CAVITIES SILICON COPPER |
| ISSN号 | 0734-2101 |
| 通讯作者 | Zhang, M, City Univ Hong Kong, Dept Phys & Mat Sci, 83 Tat Chee Ave, Kowloon, Hong Kong, Peoples R China |
| 学科主题 | Materials Science, Coatings & Films; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-03-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/95855]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, M,Zeng, XC,Chu, PK,et al. Nickel precipitation at nanocavities in separation by implantation of oxygen[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2000,18(5):2249-2253. |
| APA | Zhang, M,Zeng, XC,Chu, PK,Scholz, R,&Lin, CL.(2000).Nickel precipitation at nanocavities in separation by implantation of oxygen.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,18(5),2249-2253. |
| MLA | Zhang, M,et al."Nickel precipitation at nanocavities in separation by implantation of oxygen".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 18.5(2000):2249-2253. |
入库方式： OAI收割
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