Rotating compensator sampling for spectroscopic imaging ellipsometry
文献类型：期刊论文
| 作者 | Meng YH(孟永宏) ; Jin G(靳刚)
|
| 刊名 | Thin Solid Films
 |
| 出版日期 | 2011 |
| 卷号 | 519期号:9页码:2742-2745 |
| 通讯作者邮箱 | yhong@imech.ac.cn; gajin@imech.ac.cn |
| 关键词 | Rotating Compensator Spectroscopic Imaging Ellipsometry Spectroscopic Ellipsometry Imaging Ellipsometry Ellipsometry Nanofilm Pattern Microellipsometry Design Layers |
| ISSN号 | 0040-6090 |
| 产权排序 | [Meng, YH; Jin, G] Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China; [Meng, YH] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| 通讯作者 | Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China |
| 合作状况 | 国内 |
| 中文摘要 | In this work, a rotating compensator sampling for spectroscopic imaging ellipsometry (SIE) is presented and demonstrated by characterization of a SiO(2) nanofilm pattern on Si substrate. Experiment results within spectrum of 400-700 nm show that the rotating compensator sampling is valid for SIE to obtain the ellipsometric angle distributions psi (x, y, lambda) and Delta (x, y, lambda) over the thin film pattern, the sampling times of psi (x, y) and Delta (x, y) with 576 x 768 pixels under each wavelength is less than 8 s, the precision of fitting thickness of SiO(2) is about 0.2 nm and the lateral resolution is 60.9 mu m x 24.6 mu m in the parallel and perpendicular direction with respect to the incident plane. (C) 2010 Elsevier B.V. All rights reserved. |
| 学科主题 | Materials Science; Physics |
| 分类号 | 二类/Q2 |
| 类目[WOS] | Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 研究领域[WOS] | Materials Science ; Physics |
| 关键词[WOS] | MICROELLIPSOMETRY ; DESIGN ; LAYERS |
| 收录类别 | SCI ; EI |
| 原文出处 | http://dx.doi.org/10.1016/j.tsf.2010.12.131 |
| 语种 | 英语 |
| WOS记录号 | WOS:000289174200038 |
| 公开日期 | 2012-04-01 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/45098]  |
| 专题 | 力学研究所_国家微重力实验室 |
| 推荐引用方式 GB/T 7714 | Meng YH,Jin G. Rotating compensator sampling for spectroscopic imaging ellipsometry[J]. Thin Solid Films,2011,519(9):2742-2745. |
| APA | 孟永宏,&靳刚.(2011).Rotating compensator sampling for spectroscopic imaging ellipsometry.Thin Solid Films,519(9),2742-2745. |
| MLA | 孟永宏,et al."Rotating compensator sampling for spectroscopic imaging ellipsometry".Thin Solid Films 519.9(2011):2742-2745. |
入库方式： OAI收割
来源：力学研究所
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