Rotating compensator sampling for spectroscopic imaging ellipsometry
文献类型：会议论文
| 作者 | Meng YH(孟永宏) ; Jin G(靳刚)
|
| 出版日期 | 2011 |
| 会议名称 | 5th International Conference on Spectroscopic Ellipsometry |
| 会议日期 | MAY 23-29, 2010 |
| 会议地点 | Albany, NY |
| 通讯作者邮箱 | yhong@imech.ac.cn; gajin@imech.ac.cn |
| 关键词 | Rotating compensator Spectroscopic imaging ellipsometry Spectroscopic ellipsometry Imaging ellipsometry Ellipsometry Nanofilm pattern |
| 卷号 | 519 |
| 期号 | 9 |
| 页码 | 2742-2745 |
| 通讯作者 | Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China |
| 中文摘要 | In this work, a rotating compensator sampling for spectroscopic imaging ellipsometry (SIE) is presented and demonstrated by characterization of a SiO(2) nanofilm pattern on Si substrate. Experiment results within spectrum of 400-700 nm show that the rotating compensator sampling is valid for SIE to obtain the ellipsometric angle distributions psi (x, y, lambda) and Delta (x, y, lambda) over the thin film pattern, the sampling times of psi (x, y) and Delta (x, y) with 576 x 768 pixels under each wavelength is less than 8 s, the precision of fitting thickness of SiO(2) is about 0.2 nm and the lateral resolution is 60.9 mu m x 24.6 mu m in the parallel and perpendicular direction with respect to the incident plane. (C) 2010 Elsevier B.V. All rights reserved. |
| 收录类别 | CPCI（ISTP） |
| 产权排序 | Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China; Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| 会议主办者 | Univ Albany, Coll Nanoscale & Engn |
| 会议网址 | http://dx.doi.org/10.1016/j.tsf.2010.12.131 |
| 会议录 | THIN SOLID FILMS
 |
| 会议录出版者 | ELSEVIER SCIENCE SA |
| 学科主题 | Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| 会议录出版地 | PO BOX 564, 1001 LAUSANNE, SWITZERLAND |
| 语种 | 英语 |
| ISSN号 | 0040-6090 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/45326]  |
| 专题 | 力学研究所_国家微重力实验室 |
| 推荐引用方式 GB/T 7714 | Meng YH,Jin G. Rotating compensator sampling for spectroscopic imaging ellipsometry[C]. 见:5th International Conference on Spectroscopic Ellipsometry. Albany, NY. MAY 23-29, 2010.http://dx.doi.org/10.1016/j.tsf.2010.12.131. |
入库方式： OAI收割
来源：力学研究所
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