A precise model for the shape of an adhered microcantilever
文献类型：期刊论文
| 作者 | Zhang Y(张吟) ; Zhao YP(赵亚溥)
|
| 刊名 | Sensors and Actuators A-Physical
 |
| 出版日期 | 2011 |
| 卷号 | 171期号:2页码:381-390 |
| 通讯作者邮箱 | zhangyin@lnm.imech.ac.cn |
| 关键词 | Stiction Microcantilever Adhesion Arc-Shape S-Shape Finite Beam Adhesion Stiction Mems Contact Force Cantilevers Foundation Mechanics Work |
| ISSN号 | 0924-4247 |
| 产权排序 | [Zhang, Yin; Zhao, Ya-pu] Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China |
| 通讯作者 | Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China |
| 中文摘要 | A variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction. Compared with the Rayleigh-Ritz method using the arc-shaped or S-shaped deflection, which prescribes the boundary conditions and thus the deflection shape of a stuck cantilever beam, the new method uses the matching conditions and constraint condition derived from PVW and minimization of the system free energy to describe the boundary conditions at the contact separation point. The transition of the beam deflection from an arc-shape-like one to an S-shape-like one with the increase of the beam length is shown by the new model. The (real) beam deflection given by this new model deviates more or less from either an arc-shape or an S-shape, which has significant impact on the interpretation of experimental data. The arc-shaped or S-shaped deflection assumption ignores the beam bending energy inside the contact area and the elastic energy due to the beam/substrate contact, which is inappropriate as shown by this study. Furthermore, the arc-shaped or S-shaped deflection only approximately describes the deflection shape of a stuck beam with zero external load and obviously, the external load changes the beam deflection. The Rayleigh-Ritz method using the arc-shaped or S-shaped deflection assumption in essence can only be used to tell approximately whether stiction occurs or not. Rather than assuming a certain deflection shape and by incorporating the external load, the new method offers a more general and accurate study not only on the microcantilever beam stiction but also on its de-adherence. (C) 2011 Elsevier B.V. All rights reserved. |
| 学科主题 | Engineering; Instruments & Instrumentation |
| 分类号 | 二类/Q1 |
| 类目[WOS] | Engineering, Electrical & Electronic ; Instruments & Instrumentation |
| 研究领域[WOS] | Engineering ; Instruments & Instrumentation |
| 关键词[WOS] | FINITE BEAM ; ADHESION ; STICTION ; MEMS ; CONTACT ; FORCE ; CANTILEVERS ; FOUNDATION ; MECHANICS ; WORK |
| 收录类别 | SCI ; EI |
| 资助信息 | This work is supported by the National Natural Science Foundation of China (NSFC, Grant Nos. 10721202 and 10772180), Ministry of Science and Technology (MOST Grant No. 2010CB631004) and National Basic Research Program of China (973 Program, Grant No. 2007CB310500). |
| 原文出处 | http://dx.doi.org/10.1016/j.sna.2011.09.001 |
| 语种 | 英语 |
| WOS记录号 | WOS:000297454400045 |
| 公开日期 | 2012-04-01 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/44896]  |
| 专题 | 力学研究所_非线性力学国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Zhang Y,Zhao YP. A precise model for the shape of an adhered microcantilever[J]. Sensors and Actuators A-Physical,2011,171(2):381-390. |
| APA | 张吟,&赵亚溥.(2011).A precise model for the shape of an adhered microcantilever.Sensors and Actuators A-Physical,171(2),381-390. |
| MLA | 张吟,et al."A precise model for the shape of an adhered microcantilever".Sensors and Actuators A-Physical 171.2(2011):381-390. |
入库方式： OAI收割
来源：力学研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。