Stress reduction and performance improvement of phase change memory cell by using Ge2Sb2Te5-TaOx composite films
文献类型：期刊论文
| 作者 | Song,SN ; Song,ZT ; Wu,LC ; Liu,B ; Feng,SL |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2011 |
| 卷号 | 109期号:3页码:34503 |
| 关键词 | AMER INST PHYSICS |
| ISSN号 | 0021-8979 |
| 学科主题 | Physics ; Applied |
| 公开日期 | 2012-04-10 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/106774]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Song,SN,Song,ZT,Wu,LC,et al. Stress reduction and performance improvement of phase change memory cell by using Ge2Sb2Te5-TaOx composite films[J]. JOURNAL OF APPLIED PHYSICS,2011,109(3):34503. |
| APA | Song,SN,Song,ZT,Wu,LC,Liu,B,&Feng,SL.(2011).Stress reduction and performance improvement of phase change memory cell by using Ge2Sb2Te5-TaOx composite films.JOURNAL OF APPLIED PHYSICS,109(3),34503. |
| MLA | Song,SN,et al."Stress reduction and performance improvement of phase change memory cell by using Ge2Sb2Te5-TaOx composite films".JOURNAL OF APPLIED PHYSICS 109.3(2011):34503. |
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