Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe
文献类型：期刊论文
| 作者 | Xu, DP ; Wan, L ; （程新红） ; He, DW ; Song, ZR ; Yu, YH ; Shen, DS |
| 刊名 | RARE METAL MATERIALS AND ENGINEERING
 |
| 出版日期 | 2011 |
| 卷号 | 40期号:8页码:1344-1347 |
| 关键词 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| ISSN号 | 1002-185X |
| 学科主题 | Materials Science, Multidisciplinary; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| 公开日期 | 2012-04-10 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/106820]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xu, DP,Wan, L,et al. Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe[J]. RARE METAL MATERIALS AND ENGINEERING,2011,40(8):1344-1347. |
| APA | Xu, DP.,Wan, L.,.,He, DW.,Song, ZR.,...&Shen, DS.(2011).Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe.RARE METAL MATERIALS AND ENGINEERING,40(8),1344-1347. |
| MLA | Xu, DP,et al."Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe".RARE METAL MATERIALS AND ENGINEERING 40.8(2011):1344-1347. |
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