Investigation of phase transition behaviors of the nitrogen-doped Sb-rich Si-Sb-Te films for phase-change memory
文献类型:期刊论文
作者 | Zhou,XL ; Wu,LC ; Song,ZT ; Rao,F ; Ren,K ; Peng,C ; Liu,B ; Yao,DN ; Feng,SL ; Chen,B |
刊名 | THIN SOLID FILMS
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出版日期 | 2011 |
卷号 | 520期号:3页码:1155-1159 |
关键词 | ELSEVIER SCIENCE SA |
ISSN号 | 0040-6090 |
学科主题 | Materials Science ; Multidisciplinary; Materials Science ; Coatings & Films; Physics ; Applied; Physics ; Condensed Matter |
公开日期 | 2012-04-10 |
源URL | [http://ir.sim.ac.cn/handle/331004/106823] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Zhou,XL,Wu,LC,Song,ZT,et al. Investigation of phase transition behaviors of the nitrogen-doped Sb-rich Si-Sb-Te films for phase-change memory[J]. THIN SOLID FILMS,2011,520(3):1155-1159. |
APA | Zhou,XL.,Wu,LC.,Song,ZT.,Rao,F.,Ren,K.,...&Chen,B.(2011).Investigation of phase transition behaviors of the nitrogen-doped Sb-rich Si-Sb-Te films for phase-change memory.THIN SOLID FILMS,520(3),1155-1159. |
MLA | Zhou,XL,et al."Investigation of phase transition behaviors of the nitrogen-doped Sb-rich Si-Sb-Te films for phase-change memory".THIN SOLID FILMS 520.3(2011):1155-1159. |
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