Real-Time Observation of Film Structure Using X-ray Waveguide Phenomenon
文献类型：期刊论文
| 作者 | Hayashi, K ; Hu, W(胡雯） ; Nakamura, T ; Takenaka, H ; Suzuki, K ; Ito, M |
| 刊名 | JAPANESE JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2009 |
| 卷号 | 48期号:11页码:3 |
| ISSN号 | 0021-4922 |
| 通讯作者 | Hayashi, K (reprint author), Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan |
| 英文摘要 | The X-ray waveguide phenomenon was applied for quick evaluation of film structure. By irradiating synchrotron radiation white X-rays on a Si/ poly(methyl methacrylate) (PMMA)/Si multilayer, we observed the spectrum of the guided X-rays, which provides information on the thickness and density of the film. and followed its variation over time due to radiation damage induced by the strong white X-ray beam The rapid PMMA layer compression, which occurring during the first 200s after the irradiation, was sensitively monitored by the present method (C) 2009 The Japan Society of Applied Physics |
| 学科主题 | Physics |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000272265300007 |
| 公开日期 | 2012-04-11 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/7034]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2004-2010年 |
| 推荐引用方式 GB/T 7714 | Hayashi, K,Hu, W,Nakamura, T,et al. Real-Time Observation of Film Structure Using X-ray Waveguide Phenomenon[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2009,48(11):3. |
| APA | Hayashi, K,Hu, W,Nakamura, T,Takenaka, H,Suzuki, K,&Ito, M.(2009).Real-Time Observation of Film Structure Using X-ray Waveguide Phenomenon.JAPANESE JOURNAL OF APPLIED PHYSICS,48(11),3. |
| MLA | Hayashi, K,et al."Real-Time Observation of Film Structure Using X-ray Waveguide Phenomenon".JAPANESE JOURNAL OF APPLIED PHYSICS 48.11(2009):3. |
入库方式： OAI收割
来源：上海应用物理研究所
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