Synthesis of thin diamond films from faceted nanosized crystallites
文献类型：期刊论文
| 作者 | Rakha, SA ; Yang, SM(杨树敏） ; He, ZT（贺周同） ; Ahmed, I ; Zhu, DZ（朱德彰） ; Gong, JL（巩金龙） |
| 刊名 | CURRENT APPLIED PHYSICS
 |
| 出版日期 | 2009 |
| 卷号 | 9期号:3页码:5 |
| 关键词 | Hot filament CVD Nanocrystalline Diamond films Electron microscopy |
| ISSN号 | 1567-1739 |
| 通讯作者 | Rakha, SA (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China |
| 英文摘要 | Diamond films consist of crystallites having nanometer grains were deposited using low methane concentration by hot filament chemical vapor deposition (HFCVD). The results show that films consist of nanodiamond grains with grain sizes ranging from 20 nm to 200 nm having thickness dependent size. Increasing the deposition time, the grain size increases and hence the thickness of the film increases. The diamond nucleation (nucleation density 10(10) cm(-2)) is comparable to that obtained by biasing the substrate. The use of low methane concentration for the formation of nano crystallites improves the quality of the film as indicated by Raman spectroscopy. The distance between the filament and substrate is increased while maintaining the substrate temperature. The effects of this large separation on the gas phase chemistry are discussed which helps to understand the reduced size of the crystallites under input gas ratios when microcrystallines are obtained. (C) 2008 Elsevier B.V. All rights reserved. |
| 学科主题 | Materials Science; Physics |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000263228700030 |
| 公开日期 | 2012-04-11 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/7076]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2004-2010年 |
| 推荐引用方式 GB/T 7714 | Rakha, SA,Yang, SM,He, ZT,et al. Synthesis of thin diamond films from faceted nanosized crystallites[J]. CURRENT APPLIED PHYSICS,2009,9(3):5. |
| APA | Rakha, SA,Yang, SM,He, ZT,Ahmed, I,Zhu, DZ,&Gong, JL.(2009).Synthesis of thin diamond films from faceted nanosized crystallites.CURRENT APPLIED PHYSICS,9(3),5. |
| MLA | Rakha, SA,et al."Synthesis of thin diamond films from faceted nanosized crystallites".CURRENT APPLIED PHYSICS 9.3(2009):5. |
入库方式： OAI收割
来源：上海应用物理研究所
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