Diamond films with preferred <110> texture by hot filament CVD at low pressure
文献类型：期刊论文
| 作者 | Yang, SM ; He, ZT(贺周同） ; Li, QT ; Zhu, DZ（朱德彰) ; Gong, JL(巩金龙） |
| 刊名 | DIAMOND AND RELATED MATERIALS
 |
| 出版日期 | 2008 |
| 卷号 | 17期号:12页码:2075 |
| ISSN号 | 0925-9635 |
| 通讯作者 | Gong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China |
| 英文摘要 | The effects of gas presssure on the textured growth of daimond films were investigated in a hot filament chemical vapor deposition (HFCVD) system. Diamond thin film with the growth rate of 1.3 mu m/h and with high < 110 > texture was obtained at 5 Torr when lowering the gas pressure from 40 Torr to 1 Torr. The formation of high density nanocrystalline diamond nuclei elongated along the < 110 > direction in the nucleation stage and its consequent growth at lower pressure were considered to be responsible for the formation of < 110 > textured diamond thin film. (C) 2008 Elsevier B.V. All I ights reserved. |
| 学科主题 | Physics |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000261140000016 |
| 公开日期 | 2012-04-18 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/7693]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2004-2010年 |
| 推荐引用方式 GB/T 7714 | Yang, SM,He, ZT,Li, QT,et al. Diamond films with preferred <110> texture by hot filament CVD at low pressure[J]. DIAMOND AND RELATED MATERIALS,2008,17(12):2075. |
| APA | Yang, SM,He, ZT,Li, QT,Zhu, DZ,&Gong, JL.(2008).Diamond films with preferred <110> texture by hot filament CVD at low pressure.DIAMOND AND RELATED MATERIALS,17(12),2075. |
| MLA | Yang, SM,et al."Diamond films with preferred <110> texture by hot filament CVD at low pressure".DIAMOND AND RELATED MATERIALS 17.12(2008):2075. |
入库方式： OAI收割
来源：上海应用物理研究所
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