中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Highly (111)-textured diamond film growth with high nucleation density

文献类型:期刊论文

作者Yang, SM ; Wan, DY ; He, ZT(贺周同) ; Xia, HH(夏汇浩) ; Zhu, DZ(朱德彰) ; Gong, JL(巩金龙)
刊名NUCLEAR SCIENCE AND TECHNIQUES
出版日期2008
卷号19期号:3页码:147
ISSN号1001-8042
通讯作者Gong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
英文摘要In a traditional hot-filament chemical vapor deposition (HF-CVD) system, highly (111)-textured diamond film was deposited on Si (111) substrate treated by diamond powder ultrasonic scratching or other methods. The relationship between the (111)-textured diamond film growth and the nucleation density has been discussed. The morphologies and structures of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy.
学科主题Science & Technology - Other Topics
收录类别SCI
语种英语
WOS记录号WOS:000258910300005
公开日期2012-04-18
源URL[http://ir.sinap.ac.cn/handle/331007/7746]  
专题上海应用物理研究所_中科院上海应用物理研究所2004-2010年
推荐引用方式
GB/T 7714
Yang, SM,Wan, DY,He, ZT,et al. Highly (111)-textured diamond film growth with high nucleation density[J]. NUCLEAR SCIENCE AND TECHNIQUES,2008,19(3):147.
APA Yang, SM,Wan, DY,He, ZT,Xia, HH,Zhu, DZ,&Gong, JL.(2008).Highly (111)-textured diamond film growth with high nucleation density.NUCLEAR SCIENCE AND TECHNIQUES,19(3),147.
MLA Yang, SM,et al."Highly (111)-textured diamond film growth with high nucleation density".NUCLEAR SCIENCE AND TECHNIQUES 19.3(2008):147.

入库方式: OAI收割

来源:上海应用物理研究所

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