Highly (111)-textured diamond film growth with high nucleation density
文献类型:期刊论文
作者 | Yang, SM ; Wan, DY ; He, ZT(贺周同) ; Xia, HH(夏汇浩) ; Zhu, DZ(朱德彰) ; Gong, JL(巩金龙) |
刊名 | NUCLEAR SCIENCE AND TECHNIQUES
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出版日期 | 2008 |
卷号 | 19期号:3页码:147 |
ISSN号 | 1001-8042 |
通讯作者 | Gong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China |
英文摘要 | In a traditional hot-filament chemical vapor deposition (HF-CVD) system, highly (111)-textured diamond film was deposited on Si (111) substrate treated by diamond powder ultrasonic scratching or other methods. The relationship between the (111)-textured diamond film growth and the nucleation density has been discussed. The morphologies and structures of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy. |
学科主题 | Science & Technology - Other Topics |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000258910300005 |
公开日期 | 2012-04-18 |
源URL | [http://ir.sinap.ac.cn/handle/331007/7746] ![]() |
专题 | 上海应用物理研究所_中科院上海应用物理研究所2004-2010年 |
推荐引用方式 GB/T 7714 | Yang, SM,Wan, DY,He, ZT,et al. Highly (111)-textured diamond film growth with high nucleation density[J]. NUCLEAR SCIENCE AND TECHNIQUES,2008,19(3):147. |
APA | Yang, SM,Wan, DY,He, ZT,Xia, HH,Zhu, DZ,&Gong, JL.(2008).Highly (111)-textured diamond film growth with high nucleation density.NUCLEAR SCIENCE AND TECHNIQUES,19(3),147. |
MLA | Yang, SM,et al."Highly (111)-textured diamond film growth with high nucleation density".NUCLEAR SCIENCE AND TECHNIQUES 19.3(2008):147. |
入库方式: OAI收割
来源:上海应用物理研究所
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