A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure
文献类型：期刊论文
| 作者 | Che, LF ; Xiong, B ; Li, YF ; Wang, YL |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2010 |
| 卷号 | 20期号:4 Pages页码:015025 |
| 公开日期 | 2012-05-12 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/108737]  |
| 专题 | 上海微系统与信息技术研究所_传感技术联合国家重点实验室_期刊论文 |
| 推荐引用方式 GB/T 7714 | Che, LF,Xiong, B,Li, YF,et al. A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2010,20(4 Pages):015025. |
| APA | Che, LF,Xiong, B,Li, YF,&Wang, YL.(2010).A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,20(4 Pages),015025. |
| MLA | Che, LF,et al."A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 20.4 Pages(2010):015025. |
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