Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications
文献类型：期刊论文
| 作者 | Li, SH ; Xua, J ; Zhong, SL ; Wu, YM |
| 刊名 | SENSORS AND ACTUATORS A-PHYSICAL
 |
| 出版日期 | 2011 |
| 卷号 | 171期号:2 Pages页码:274-282 |
| 公开日期 | 2012-05-12 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/108799]  |
| 专题 | 上海微系统与信息技术研究所_传感技术联合国家重点实验室_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, SH,Xua, J,Zhong, SL,et al. Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications[J]. SENSORS AND ACTUATORS A-PHYSICAL,2011,171(2 Pages):274-282. |
| APA | Li, SH,Xua, J,Zhong, SL,&Wu, YM.(2011).Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications.SENSORS AND ACTUATORS A-PHYSICAL,171(2 Pages),274-282. |
| MLA | Li, SH,et al."Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications".SENSORS AND ACTUATORS A-PHYSICAL 171.2 Pages(2011):274-282. |
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