Crystallization of Ferroelectric Lead Zirconate Titanate Thin Films by Microwave Annealing at Low Temperatures
文献类型：期刊论文
| 作者 | Z. J. Wang ; Y. N. Chen ; Y. Otsuka ; M. W. Zhu ; Z. P. Cao ; H. Kokawa |
| 刊名 | Journal of the American Ceramic Society
 |
| 出版日期 | 2011 |
| 卷号 | 94期号:2页码:404-409 |
| 关键词 | sol-gel method time texture transition electrical-properties laser-ablation hybrid process microstructure deposition route phase |
| ISSN号 | 0002-7820 |
| 中文摘要 | Lead zirconate titanate (PZT) thin films were coated on Pt/Ti/SiO(2)/Si substrates by the sol-gel method and then crystallized by microwave annealing using a single-mode 2.45 GHz microwave irradiation system in the magnetic field. The crystalline phases and microstructures as well as the ferroelectric properties of the PZT films were investigated as a function of the elevated temperature generated by microwave irradiation, and the phase transition in the crystallization of the PZT thin films was discussed. X-ray diffraction analysis and transmission electron microscopic study indicated that the crystallization to the perovskite phase in the PZT films by microwave annealing started at 430 degrees C, and mostly finished at 450 degrees C for 30 min. The remanent polarization of the PZT films increased with the increasing annealing temperature, and the lowest temperature required to obtain perovskite PZT films with good ferroelectric properties in the microwave irradiation processing was 450 degrees C, which is much lower than that in conventional thermal processing. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://210.72.142.130/handle/321006/30764]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Z. J. Wang,Y. N. Chen,Y. Otsuka,et al. Crystallization of Ferroelectric Lead Zirconate Titanate Thin Films by Microwave Annealing at Low Temperatures[J]. Journal of the American Ceramic Society,2011,94(2):404-409. |
| APA | Z. J. Wang,Y. N. Chen,Y. Otsuka,M. W. Zhu,Z. P. Cao,&H. Kokawa.(2011).Crystallization of Ferroelectric Lead Zirconate Titanate Thin Films by Microwave Annealing at Low Temperatures.Journal of the American Ceramic Society,94(2),404-409. |
| MLA | Z. J. Wang,et al."Crystallization of Ferroelectric Lead Zirconate Titanate Thin Films by Microwave Annealing at Low Temperatures".Journal of the American Ceramic Society 94.2(2011):404-409. |
入库方式： OAI收割
来源：金属研究所
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