Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films
文献类型：期刊论文
| 作者 | Y. Yang ; S. S. Zhao ; J. Gong ; X. Jiang ; C. Sun |
| 刊名 | Journal of Materials Science & Technology
 |
| 出版日期 | 2011 |
| 卷号 | 27期号:5页码:385-392 |
| ISSN号 | 1005-0302 |
| 关键词 | Arc ion plating (Ti Heat treatment Al)N Microstructure Stress distribution 0.45 thin-films mechanical-properties hard coatings tin films pvd thickness evaporation deposition growth tools |
| 中文摘要 | (Ti,Al)N films were fabricated by arc on plating (AIP) and then annealed within a range of temperatures from 200 to 500 degrees C for 30 min in vacuum. The results indicate that the average residual stresses decrease slightly from -5.84 to -4.98 GPa with increasing annealing temperature. The stress depth distribution evolves from a sharp "bell" shape to a mild "bell" shape, suggesting a more uniform stress state in the annealed films. The microstructure of the films was also investigated in detail. The as-deposited film consists of fine columnar crystals with an amorphous phase at the interface. During heat treatment, the columnar subgrain growth was observed; meanwhile, the phenomenon of crystallization has been identified at the interface. Further more, the relationship between the residual stresses and the microstructure of the films was explored and highlighted. In addition, there is no hardness degradation of the films during heat treatment. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://210.72.142.130/handle/321006/30838]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Y. Yang,S. S. Zhao,J. Gong,et al. Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films[J]. Journal of Materials Science & Technology,2011,27(5):385-392. |
| APA | Y. Yang,S. S. Zhao,J. Gong,X. Jiang,&C. Sun.(2011).Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films.Journal of Materials Science & Technology,27(5),385-392. |
| MLA | Y. Yang,et al."Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films".Journal of Materials Science & Technology 27.5(2011):385-392. |
入库方式： OAI收割
来源：金属研究所
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