Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C
文献类型:期刊论文
作者 | J. J. Li ; L. F. Hu ; F. Z. Li ; M. S. Li ; Y. C. Zhou |
刊名 | Surface & Coatings Technology
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出版日期 | 2010 |
卷号 | 204期号:23页码:3838-3845 |
关键词 | Cr(2)AlC coating alpha-(Cr MAX phase Al)(2)O(3) Magnetron sputtering Microstructure Substrate temperature phase thin-films ab-initio calculations select max phases tribological behavior m(n+1)ax(n) phases deposited chromium oxidation behavior vapor deposits nitride films bulk cr2alc |
ISSN号 | 0257-8972 |
中文摘要 | Cr(2)AlC coating was deposited at 370 and 500 degrees C by D.C. magnetron sputtering from an as-synthesized bulk Cr(2)AlC target. The phase composition and preferential orientation of the coating were investigated using XRD, and the microstructure of the coating was characterized by TEM. Results indicated that Cr(2)AlC coating with a strong (110) preferential orientation could be obtained. The coating microstructure was clearly affected by the deposition temperature. At 370 degrees C, the deposited coating possessed a triple-layered structure with an alpha-(Cr, Al)(2)O(3) inner layer, an amorphous intermediate layer and a crystalline Cr(2)AlC outer layer. However, the coating deposited at 500 degrees C had a single-layered structure consisting of crystalline Cr(2)AlC layer. The growth mechanism of the Cr(2)AlC coating at different deposition temperatures is discussed. (C) 2010 Elsevier B.V. All rights reserved. |
原文出处 | |
公开日期 | 2012-04-13 |
源URL | [http://210.72.142.130/handle/321006/31220] ![]() |
专题 | 金属研究所_中国科学院金属研究所 |
推荐引用方式 GB/T 7714 | J. J. Li,L. F. Hu,F. Z. Li,et al. Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C[J]. Surface & Coatings Technology,2010,204(23):3838-3845. |
APA | J. J. Li,L. F. Hu,F. Z. Li,M. S. Li,&Y. C. Zhou.(2010).Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C.Surface & Coatings Technology,204(23),3838-3845. |
MLA | J. J. Li,et al."Variation of microstructure and composition of the Cr(2)AlC coating prepared by sputtering at 370 and 500 degrees C".Surface & Coatings Technology 204.23(2010):3838-3845. |
入库方式: OAI收割
来源:金属研究所
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