Effects of nitrogen pressure and pulse bias voltage on the properties of Cr-N coatings deposited by arc ion plating
文献类型：期刊论文
| 作者 | X. S. Wan ; S. S. Zhao ; Y. Yang ; J. Gong ; C. Sun |
| 刊名 | Surface & Coatings Technology
 |
| 出版日期 | 2010 |
| 卷号 | 204期号:11页码:1800-1810 |
| 关键词 | Arc ion plating Cr-N coating Nitrogen pressure Pulse bias voltage chromium nitride films thin-films cathodic vacuum tin behavior stress macroparticles evaporation plasma charge |
| ISSN号 | 0257-8972 |
| 中文摘要 | Cr-N coatings were deposited on 1Cr18Ni9Ti stainless steel in the pure N(2) atmosphere by arc ion plating (AIP). The relationships between deposition parameters and coating properties were investigated. X-ray diffraction showed a phase transformation from CrN+Cr(2)N+Cr-->CrN+Cr-->CrN and the CrN preferred orientation changed from (200) to (220) as N(2) pressure increased. Increasing bias voltage led to CrN preferred orientation changed from (200) to (220) and the formation of Cr(2)N. XPS results indicated that chemical composition of the coatings changed as N(2) pressure increased but it changed little with bias voltage. The lower melting point of chromium nitride formed on target surface induced the increase of macroparticles and deposition rate with increasing N(2) pressure; and bias voltage had an obvious effect on reducing macroparticles of the Cr-N coatings. Residual stresses were measured by substrate curvature technique, and the changing tendency coincided with the microhardness of the coatings. (C) 2009 Elsevier B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/31487]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | X. S. Wan,S. S. Zhao,Y. Yang,et al. Effects of nitrogen pressure and pulse bias voltage on the properties of Cr-N coatings deposited by arc ion plating[J]. Surface & Coatings Technology,2010,204(11):1800-1810. |
| APA | X. S. Wan,S. S. Zhao,Y. Yang,J. Gong,&C. Sun.(2010).Effects of nitrogen pressure and pulse bias voltage on the properties of Cr-N coatings deposited by arc ion plating.Surface & Coatings Technology,204(11),1800-1810. |
| MLA | X. S. Wan,et al."Effects of nitrogen pressure and pulse bias voltage on the properties of Cr-N coatings deposited by arc ion plating".Surface & Coatings Technology 204.11(2010):1800-1810. |
入库方式： OAI收割
来源：金属研究所
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