热门
Size-effect on stress behavior of the AlN/TiN film
文献类型：期刊论文
| 作者 | D. Chen ; Y. M. Wang ; X. L. Ma |
| 刊名 | Acta Materialia
 |
| 出版日期 | 2009 |
| 卷号 | 57期号:8页码:2576-2582 |
| 关键词 | Superlattice Stress Transformation Simulation chemical potential concepts highly strained ingaas atomistic simulations molecular-dynamics aluminum nitride coherent growth aln phase cubic aln superlattices stabilization |
| ISSN号 | 1359-6454 |
| 中文摘要 | The stress behavior of AlN/TiN superlattice film has been studied by means of a crystal-chemical atomic dynamics simulation based oil first-principles calculations. The size-effects oil stress behavior are demonstrated and discussed in detail. Stress behavior depends not only oil AlN thickness but also On structural relaxation and strain distribution in the film. When the AlN thickness exceeds a critical one. the superlattice film is metastable. Stress behavior can be traced to the AlN/TiN interface structure and its variation with strain relaxation.) which may reflect the main strain characteristics caused by AlN structural transformation in this film. (C) 2009 Acta Materialia Inc. Published by elsevier Ltd. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://210.72.142.130/handle/321006/31822]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | D. Chen,Y. M. Wang,X. L. Ma. Size-effect on stress behavior of the AlN/TiN film[J]. Acta Materialia,2009,57(8):2576-2582. |
| APA | D. Chen,Y. M. Wang,&X. L. Ma.(2009).Size-effect on stress behavior of the AlN/TiN film.Acta Materialia,57(8),2576-2582. |
| MLA | D. Chen,et al."Size-effect on stress behavior of the AlN/TiN film".Acta Materialia 57.8(2009):2576-2582. |
入库方式： OAI收割
来源：金属研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。