Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets
文献类型：期刊论文
| 作者 | D. P. Sigumonrong ; J. Zhang ; Y. C. Zhou ; D. Music ; J. M. Schneider |
| 刊名 | Journal of Physics D-Applied Physics
 |
| 出版日期 | 2009 |
| 卷号 | 42期号:18 |
| 关键词 | initio molecular-dynamics chemical-vapor-deposition augmented-wave method mechanical-properties electronic-properties transition-metals ternary ceramics vanadium carbide gas-mixtures al-c |
| ISSN号 | 0022-3727 |
| 中文摘要 | The influence of deposition temperature on phase formation of V(2)AlC is studied by magnetron sputtering from elemental targets. At substrate temperatures below 750 degrees C, we observed the formation of Al(x)V(y) and V(2)C using x-ray diffraction (XRD) analysis. At 750 degrees C, a phase pure polycrystalline V(2)AlC film on a similar to 12 nm thick transition layer has been observed using XRD and transmission electron microscopy. Selected area electron diffraction indicates that the film grown on the transition layer consists of phase pure V(2)AlC. As the substrate temperature is increased to 850 degrees C, the formation of V(2)C in addition to the V(2)AlC phase is observed. This may be due to desorption of aluminium causing the decomposition of V(2)AlC into vanadium carbides and aluminium. The V(2)AlC film is fully dense and polycrystalline and the elastic modulus based on nanoindentation is within the expected error margin consistent with previously reported theoretical calculations and the diamond anvil cell measurement of bulk V(2)AlC samples. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://210.72.142.130/handle/321006/32283]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | D. P. Sigumonrong,J. Zhang,Y. C. Zhou,et al. Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets[J]. Journal of Physics D-Applied Physics,2009,42(18). |
| APA | D. P. Sigumonrong,J. Zhang,Y. C. Zhou,D. Music,&J. M. Schneider.(2009).Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets.Journal of Physics D-Applied Physics,42(18). |
| MLA | D. P. Sigumonrong,et al."Synthesis and elastic properties of V(2)AlC thin films by magnetron sputtering from elemental targets".Journal of Physics D-Applied Physics 42.18(2009). |
入库方式： OAI收割
来源：金属研究所
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