Electrical Properties and Microstructure of Low-Temperature-Crystallized Lead Zirconate Titanate Thin Films Prepared by 2.45GHz Microwave Irradiation
文献类型：期刊论文
| 作者 | Z. J. Wang ; Y. Otsuka ; Z. P. Cao ; H. Kokawa |
| 刊名 | Japanese Journal of Applied Physics
 |
| 出版日期 | 2009 |
| 卷号 | 48期号:9 |
| 关键词 | pzt ghz ferroelectrics fabrication |
| ISSN号 | 0021-4922 |
| 中文摘要 | Lead zirconate titanate (PZT) thin films were coated on Pt/Ti/SiO(2)/Si substrates by a sol-gel method and then crystallized at 490 degrees C using the magnetic field of 2.45GHz microwave irradiation. The crystalline phases and microstructures as well as the electrical properties of the PZT thin films were investigated. X-ray diffraction analysis indicated that the films were crystallized well into the perovskite phase. Scanning electron microscopy showed that the PZT films had a typical rosette structure, which consisted of large round grains on a matrix of fine grains. A transmission electron microscopy (TEM) study revealed that the fine grains were also mainly crystallized into the perovskite phase. The average remanent polarization and coercive field of the PZT films were approximately 21 mu C/cm(2) and 92 kV/cm, respectively, whereas the dielectric constant and loss value measured at 1 kHz were approximately 510 and 0.07, respectively. (C) 2009 The Japan Society of Applied Physics |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/32411]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Z. J. Wang,Y. Otsuka,Z. P. Cao,et al. Electrical Properties and Microstructure of Low-Temperature-Crystallized Lead Zirconate Titanate Thin Films Prepared by 2.45GHz Microwave Irradiation[J]. Japanese Journal of Applied Physics,2009,48(9). |
| APA | Z. J. Wang,Y. Otsuka,Z. P. Cao,&H. Kokawa.(2009).Electrical Properties and Microstructure of Low-Temperature-Crystallized Lead Zirconate Titanate Thin Films Prepared by 2.45GHz Microwave Irradiation.Japanese Journal of Applied Physics,48(9). |
| MLA | Z. J. Wang,et al."Electrical Properties and Microstructure of Low-Temperature-Crystallized Lead Zirconate Titanate Thin Films Prepared by 2.45GHz Microwave Irradiation".Japanese Journal of Applied Physics 48.9(2009). |
入库方式： OAI收割
来源：金属研究所
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