Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation
文献类型:期刊论文
作者 | Z. J. Wang ; Z. P. Cao ; Y. Otsuka ; N. Yoshikawa ; H. Kokawa ; S. Taniguchi |
刊名 | Applied Physics Letters
![]() |
出版日期 | 2008 |
卷号 | 92期号:22 |
关键词 | electrical-properties microstructures srtio3 |
ISSN号 | 0003-6951 |
中文摘要 | Pb(Zr(x)Ti(1-x))O(3) (PZT) thin films were coated on Pt/Ti/SiO(2)/Si substrates by the sol-gel method and then crystallized by using the magnetic field of 2.45 GHz microwave irradiation. The elevated temperature generated by microwave irradiation used to obtain the perovskite phase was only 450 degrees C, which is significantly lower than that of conventional thermal processing. The PZT films crystallized by microwave irradiation showed similar ferroelectric properties to those of the films crystallized by conventional thermal processing at 600 degrees C. It is clear that single-mode 2.45 GHz microwave irradiation in the microwave magnetic field is effective for obtaining perovskite PZT thin films at low temperatures. (c) 2008 American Institute of Physics. |
原文出处 | |
公开日期 | 2012-04-13 |
源URL | [http://210.72.142.130/handle/321006/33173] ![]() |
专题 | 金属研究所_中国科学院金属研究所 |
推荐引用方式 GB/T 7714 | Z. J. Wang,Z. P. Cao,Y. Otsuka,et al. Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation[J]. Applied Physics Letters,2008,92(22). |
APA | Z. J. Wang,Z. P. Cao,Y. Otsuka,N. Yoshikawa,H. Kokawa,&S. Taniguchi.(2008).Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation.Applied Physics Letters,92(22). |
MLA | Z. J. Wang,et al."Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation".Applied Physics Letters 92.22(2008). |
入库方式: OAI收割
来源:金属研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。