中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

文献类型:期刊论文

作者Z. J. Wang ; Z. P. Cao ; Y. Otsuka ; N. Yoshikawa ; H. Kokawa ; S. Taniguchi
刊名Applied Physics Letters
出版日期2008
卷号92期号:22
关键词electrical-properties microstructures srtio3
ISSN号0003-6951
中文摘要Pb(Zr(x)Ti(1-x))O(3) (PZT) thin films were coated on Pt/Ti/SiO(2)/Si substrates by the sol-gel method and then crystallized by using the magnetic field of 2.45 GHz microwave irradiation. The elevated temperature generated by microwave irradiation used to obtain the perovskite phase was only 450 degrees C, which is significantly lower than that of conventional thermal processing. The PZT films crystallized by microwave irradiation showed similar ferroelectric properties to those of the films crystallized by conventional thermal processing at 600 degrees C. It is clear that single-mode 2.45 GHz microwave irradiation in the microwave magnetic field is effective for obtaining perovskite PZT thin films at low temperatures. (c) 2008 American Institute of Physics.
原文出处://WOS:000256527900062
公开日期2012-04-13
源URL[http://210.72.142.130/handle/321006/33173]  
专题金属研究所_中国科学院金属研究所
推荐引用方式
GB/T 7714
Z. J. Wang,Z. P. Cao,Y. Otsuka,et al. Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation[J]. Applied Physics Letters,2008,92(22).
APA Z. J. Wang,Z. P. Cao,Y. Otsuka,N. Yoshikawa,H. Kokawa,&S. Taniguchi.(2008).Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation.Applied Physics Letters,92(22).
MLA Z. J. Wang,et al."Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation".Applied Physics Letters 92.22(2008).

入库方式: OAI收割

来源:金属研究所

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