Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation
文献类型：期刊论文
| 作者 | Z. J. Wang ; Y. Otsuka ; Z. P. Cao ; N. Yoshikawa ; H. Kokawa |
| 刊名 | Japanese Journal of Applied Physics
 |
| 出版日期 | 2008 |
| 卷号 | 47期号:9页码:7519-7522 |
| 关键词 | lead zirconate titanate (PZT) sol-gel microwave irradiation microstructure electrical properties electrical-properties laser-ablation pb content microstructures |
| ISSN号 | 0021-4922 |
| 中文摘要 | Pb(Zr(0.5)Ti(0.48))O(3) (PZT) thin films were coated onto Pt/Ti/SiO(2)/Si substrates by a sol-gel method and then crystallized by 2.45 GHz microwave irradiation in a magnetic field. The crystalline phases and microstructures as well as the electrical properties of the microwave-irradiated PZT films were investigated as a function of the elevated temperature generated by microwave irradiation. The perovskite PZT thin films with good electrical properties could be obtained by microwave irradiation at 650 C for 60 s. The average values of the remanent polarization and the coercive field of the PZT films were approximately 27 mu C/cm(2) and 95 kV/cm, respectively, whereas the dielectric constant and loss value measured at 1 kHz were approximately 1100 and 0.18. respectively. It is clear that microwave irradiation is effective for obtaining well-crystallized PZT films with good properties in a short process time. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/33174]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Z. J. Wang,Y. Otsuka,Z. P. Cao,et al. Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation[J]. Japanese Journal of Applied Physics,2008,47(9):7519-7522. |
| APA | Z. J. Wang,Y. Otsuka,Z. P. Cao,N. Yoshikawa,&H. Kokawa.(2008).Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation.Japanese Journal of Applied Physics,47(9),7519-7522. |
| MLA | Z. J. Wang,et al."Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation".Japanese Journal of Applied Physics 47.9(2008):7519-7522. |
入库方式： OAI收割
来源：金属研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。