Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films
文献类型：期刊论文
| 作者 | M. W. Zhu ; J. Gong ; C. Sun ; J. H. Xia ; X. Jiang |
| 刊名 | Journal of Applied Physics
 |
| 出版日期 | 2008 |
| 卷号 | 104期号:7 |
| 关键词 | doped zinc-oxide crystallization behavior polycrystalline transparent al semiconductors transport sapphire pressure rf |
| ISSN号 | 0021-8979 |
| 中文摘要 | Pure ZnO and aluminum doped ZnO films (ZAO) were prepared by sol-gel method and the effect of Al doping on the microstructure and electrical properties of the films was investigated. The results showed that the transformation from granular to columnar structure could be observed in pure ZnO films with the increase in heating time while in aluminum doped films little structural changes occurred even after a prolonged heating time. Additionally, measurements of electrical properties showed that both microstructural evolution and doping could significantly improve the conductivity of the films, which could be assigned to an increase both in Hall mobility and carrier concentration. The relationship between microstructure and the electrical properties of the films was discussed, and various scattering mechanisms were proposed for sol-gel derived ZnO and ZAO films as a function of the carrier concentration. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2993978] |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://210.72.142.130/handle/321006/33407]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | M. W. Zhu,J. Gong,C. Sun,et al. Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films[J]. Journal of Applied Physics,2008,104(7). |
| APA | M. W. Zhu,J. Gong,C. Sun,J. H. Xia,&X. Jiang.(2008).Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films.Journal of Applied Physics,104(7). |
| MLA | M. W. Zhu,et al."Investigation of correlation between the microstructure and electrical properties of sol-gel derived ZnO based thin films".Journal of Applied Physics 104.7(2008). |
入库方式： OAI收割
来源：金属研究所
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