Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling
文献类型：期刊论文
| 作者 | H. Hua ; X. Hui-Min ; G. Zhi-Qiang ; L. Qiang ; G. Chang-Zhi ; Q. Hai-Chang ; R. Li-Jian |
| 刊名 | Chinese Physics Letters
 |
| 出版日期 | 2007 |
| 卷号 | 24期号:9页码:2521-2524 |
| ISSN号 | 0256-307X |
| 中文摘要 | A focused gallium ion (Ga+) beam is used to fabricate micro/submicron spacing gratings on the surface of porous NiTi shape memory alloy (SMA). The crossing type of gratings with double-frequency (2500 l/mm and 5000 l/mm) using the focused ion beam (FIB) milling are successfully produced in a combination mode or superposition mode. Based on the double-frequency gratings, high-quality scanning electron microscopy (SEM) Moire patterns are obtained to study the micro-scale deformation of porous NiTi SMA. The grating fabrication technique is discussed in detail. The experimental results verify the feasibility of fabricating high frequency grating on metal surface using FIB milling. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/33591]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | H. Hua,X. Hui-Min,G. Zhi-Qiang,et al. Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling[J]. Chinese Physics Letters,2007,24(9):2521-2524. |
| APA | H. Hua.,X. Hui-Min.,G. Zhi-Qiang.,L. Qiang.,G. Chang-Zhi.,...&R. Li-Jian.(2007).Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling.Chinese Physics Letters,24(9),2521-2524. |
| MLA | H. Hua,et al."Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling".Chinese Physics Letters 24.9(2007):2521-2524. |
入库方式： OAI收割
来源：金属研究所
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