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Single adatom site exchange during the Ge growth on group V element covered Si(001)

文献类型:期刊论文

作者E. Z. Liu ; C. Y. Wang
刊名Scripta Materialia
出版日期2007
卷号56期号:2页码:113-116
关键词surface segregation surfactant semiconductor kinetics first principle electron theory mediated epitaxial-growth dimer-exchange surfactants diffusion energy
ISSN号1359-6462
中文摘要The site exchange between Ge and surfactant atoms in the growth of Ge on the group V element-covered Si(001) has been studied using first-principles total energy calculations. On the Bi-covered Si(001) and the As-covered Si(001), a single adatom site, exchange process can occur energetically, but with different pathways. The energy barriers for the single adatom site exchange are very small. The site exchange can therefore occur very easily. This will suppress the Ge diffusion, and favors the layer-by-layer growth mode. (c) 2006 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
原文出处://WOS:000242513800009
公开日期2012-04-13
源URL[http://ir.imr.ac.cn/handle/321006/33692]  
专题金属研究所_中国科学院金属研究所
推荐引用方式
GB/T 7714
E. Z. Liu,C. Y. Wang. Single adatom site exchange during the Ge growth on group V element covered Si(001)[J]. Scripta Materialia,2007,56(2):113-116.
APA E. Z. Liu,&C. Y. Wang.(2007).Single adatom site exchange during the Ge growth on group V element covered Si(001).Scripta Materialia,56(2),113-116.
MLA E. Z. Liu,et al."Single adatom site exchange during the Ge growth on group V element covered Si(001)".Scripta Materialia 56.2(2007):113-116.

入库方式: OAI收割

来源:金属研究所

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