Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy
文献类型：期刊论文
| 作者 | F. X. Liu ; K. L. Yao ; Z. L. Liu |
| 刊名 | Diamond and Related Materials
 |
| 出版日期 | 2007 |
| 卷号 | 16期号:9页码:1746-1751 |
| 关键词 | ta-C films Substrate bias sp(3) content Raman spectroscopy mixing bonds diamond-like carbon chemical-vapor-deposition cathodic vacuum-arc tribological properties dlc films mechanical-properties thin-films nitride ultraviolet coatings |
| ISSN号 | 0925-9635 |
| 中文摘要 | Diamond-like carbon (DLC) films form a critical protective layer on magnetic hard disks and their reading heads. Now tetrahedral amorphous carbon films (ta-C) thickness of 2 nm are becoming the preferred means due to the highly spa content. In this paper, Raman spectra at visible and ultraviolet excitation of ta-C films have been studied as a function of substrate bias voltage. The spectra show that the spa content of 70 nm thick DLC films increases with higher substrate bias, while spa content of 2 nm ultra-thin films falls almost linearly with bias increment. And this is also consistent with the hardness measurement of 70 nm thick films. We proposed that substrate bias enhances mixing between the carbon films and either the Si films or Al(2)O(3)TiC substrate such that thin films contain less spa fraction. These mixing bonds are longer than C-C bonds, which inducing the hardness decreasing of ultra-thin DLC films with bias. But for 70 nm DLC, the effect of mixing layer can be negligible by compared to bias effect with higher carbon ion energy. So spa content will increase for thick films with substrate bias. (c) 2007 Elsevier B.V. All tights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/33694]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | F. X. Liu,K. L. Yao,Z. L. Liu. Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy[J]. Diamond and Related Materials,2007,16(9):1746-1751. |
| APA | F. X. Liu,K. L. Yao,&Z. L. Liu.(2007).Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy.Diamond and Related Materials,16(9),1746-1751. |
| MLA | F. X. Liu,et al."Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy".Diamond and Related Materials 16.9(2007):1746-1751. |
入库方式： OAI收割
来源：金属研究所
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