Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy
文献类型：期刊论文
| 作者 | F. X. Liu ; K. L. Yao ; Z. L. Liu |
| 刊名 | Surface & Coatings Technology
 |
| 出版日期 | 2007 |
| 卷号 | 201期号:16-17页码:7235-7240 |
| 关键词 | tetrahedral amorphous carbon films Raman spectra substrate tilting angle internal stress hardness diamond-like carbon cathodic vacuum-arc mechanical-properties coatings ultraviolet deposition |
| ISSN号 | 0257-8972 |
| 中文摘要 | Raman spectra at visible and ultraviolet excitation of tetrahedral amorphous carbon (ta-C) films have been studied as a function of oblique angles of substrates while keeping the energy of incident particles stable. The substrate angle is varied from 0 to 60 degrees. The spectra show that the films contain less sp 3 content and more ordered sp 2 clustering as the substrate tilting angle increases from 0 to 60 degrees for thicker films of 70 rim, and also a decrease of sp 3 content for thinner films of 2 rim from 0 to 45 degrees. Raman data indicates the substrate tilting can dramatically lower internal stress while having less influence on hardness because hardness is related to sp(3) content, but internal stress is related to not only sp(3) content but the order of sp 2 cluster. And this is also consistent with the measurement of hardness and internal stress for thicker films of 70 nm. The implications of these results on the mechanisms proposed for the film formation were discussed. lt can provide a way for film application in magnetic recording slider that requires less internal stress and suitable hardness. (C) 2007 Elsevier B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/33697]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | F. X. Liu,K. L. Yao,Z. L. Liu. Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy[J]. Surface & Coatings Technology,2007,201(16-17):7235-7240. |
| APA | F. X. Liu,K. L. Yao,&Z. L. Liu.(2007).Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy.Surface & Coatings Technology,201(16-17),7235-7240. |
| MLA | F. X. Liu,et al."Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy".Surface & Coatings Technology 201.16-17(2007):7235-7240. |
入库方式： OAI收割
来源：金属研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。