Fabrication and investigation of tungsten deposit on top and bottom surfaces of thin film substrate
文献类型：期刊论文
| 作者 | Z. Q. Liu ; K. Mitsuishi ; K. Furuya |
| 刊名 | Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers
 |
| 出版日期 | 2007 |
| 卷号 | 46期号:9B页码:6254-6257 |
| 关键词 | electron-beam-induced deposition (EBID) nanofabrication tungsten microstructure TEM beam-induced deposition standing w-nanodendrites electron-microscope sio2 substrate growth-rate voltage devices |
| ISSN号 | 0021-4922 |
| 中文摘要 | Electrons with energies of 20, 200, and 400 keV were used in electron-beam-induced deposition (EBID) to investigate deposition on both the top and bottom surfaces of a film substrate when an electron beam is injected into the top surface. Tungsten tips were successfully fabricated on the-bottom surface of the film substrate using 200 and 400 keV electrons. The microstructure as-deposited at a different electron energy,is a mixture of nanocrystallites and amorphous materials. The nanocrystallites of the structure deposited using 20 keV electrons (1-2 nm) were smaller than those of the structures deposited using 200 keV (2-4 nm) and 400 keV electrons (3-5 nm). The proportion of amorphous materials in the as-deposited structure was reduced using high-energy electrons. There was no difference in microstructure between the top and bottom tips simultaneously deposited on the film substrate using high-energy electrons. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/33728]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Z. Q. Liu,K. Mitsuishi,K. Furuya. Fabrication and investigation of tungsten deposit on top and bottom surfaces of thin film substrate[J]. Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers,2007,46(9B):6254-6257. |
| APA | Z. Q. Liu,K. Mitsuishi,&K. Furuya.(2007).Fabrication and investigation of tungsten deposit on top and bottom surfaces of thin film substrate.Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers,46(9B),6254-6257. |
| MLA | Z. Q. Liu,et al."Fabrication and investigation of tungsten deposit on top and bottom surfaces of thin film substrate".Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers 46.9B(2007):6254-6257. |
入库方式： OAI收割
来源：金属研究所
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