Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films
文献类型：期刊论文
| 作者 | M. Yu ; J. Z. Zhang ; D. X. Li ; Q. L. Meng ; W. Z. Li |
| 刊名 | Applied Surface Science
 |
| 出版日期 | 2007 |
| 卷号 | 253期号:6页码:3276-3283 |
| 关键词 | MEVVA IBAD Cr/Cu film nanohardness adhesion mechanical-properties tin nanoindentation substrate strength stress glass cr |
| ISSN号 | 0169-4332 |
| 中文摘要 | Two groups of Cr/Cu multilayer films were deposited on surfaces of Si (1 0 0) crystal and Al2O3 ceramic, respectively. One group was prepared by both metal vapor vacuum-arc (MEVVA) ion implantation and ion beam assistant deposition (IBAD) technologies with different sputtering ion densities and deposition times. The other group was prepared only by IBAD. The morphologies of the Cr/Cu films and cross-section micrographs were observed by scanning electron microscopy (SEM). Nanohardness, modulus, and adhesive strength of the Cr/Cu films were measured by a nano-indenter. Continuous stiffness measurement (CSM) was used while measuring nanohardness and modulus of the samples. The experimental data indicate that the adhesive strength of the samples prepared with MEVVA ion implantation was about 3-3.5 times higher than one of the corresponding samples prepared without MEVVA ion implantation. The nanohardness and modulus of the Cr/Cu films were obviously affected by the test parameters and substrate kind. (c) 2006 Elsevier B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/34010]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | M. Yu,J. Z. Zhang,D. X. Li,et al. Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films[J]. Applied Surface Science,2007,253(6):3276-3283. |
| APA | M. Yu,J. Z. Zhang,D. X. Li,Q. L. Meng,&W. Z. Li.(2007).Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films.Applied Surface Science,253(6),3276-3283. |
| MLA | M. Yu,et al."Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films".Applied Surface Science 253.6(2007):3276-3283. |
入库方式： OAI收割
来源：金属研究所
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