Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method
文献类型：期刊论文
| 作者 | M. W. Zhu ; H. Huang ; J. Gong ; C. Sun ; X. Jiang |
| 刊名 | Journal of Applied Physics
 |
| 出版日期 | 2007 |
| 卷号 | 102期号:4 |
| 关键词 | zno thin-films spray pyrolysis transparent magnetron devices |
| ISSN号 | 0021-8979 |
| 中文摘要 | Aluminum doped zinc oxide (ZAO) films were prepared by sol gel dip-coating process. Several annealing treatments were carried out to improve the conductivity of ZAO films. The results show that the annealing temperature and the cooling rate have significant effects on the resistivity of ZAO films. A minimum resistivity of 5.97x10(-3) Omega cm with the transmission in visible light region above 85% can be obtained after vacuum annealing. The desorption of oxygen that is chemisorbed on the surface and at the grain boundary is thought to be responsible for the observed improvement. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/34111]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | M. W. Zhu,H. Huang,J. Gong,et al. Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method[J]. Journal of Applied Physics,2007,102(4). |
| APA | M. W. Zhu,H. Huang,J. Gong,C. Sun,&X. Jiang.(2007).Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method.Journal of Applied Physics,102(4). |
| MLA | M. W. Zhu,et al."Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method".Journal of Applied Physics 102.4(2007). |
入库方式： OAI收割
来源：金属研究所
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