Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band
文献类型：期刊论文
| 作者 | H. Du ; J. Q. Xiao ; Y. S. Zou ; T. G. Wang ; J. Gong ; C. Sun ; L. S. Wen |
| 刊名 | Optical Materials
 |
| 出版日期 | 2006 |
| 卷号 | 28期号:8-9页码:944-949 |
| 关键词 | ultrathin aluminum film reflectivity transmittivity optical constant permittivity effective medium theory copper-films gold |
| ISSN号 | 0925-3467 |
| 中文摘要 | A set of ultrathin aluminum films deposited by direct current (DC) magnetron sputtering were studied on optical properties in the visible band ex situ. The contaminated surface layer were studied on thickness by X-ray photoelectron spectroscopy (XPS), as well as its influence on reflectivity and transmittivity of these films by scanning spectrophotometer. The optical constant and permittivity were calculated from the measured reflectivity and transmittivity of these films. All results show that the optical properties depend on the film thickness. Comparison between the experimental results and the simulation based on Maxwell-Garnett model of effective medium theory (EMT) on permittivity indicates the essential underlying role of microstructure in the optical properties of the ultrathin aluminum films. (C) 2005 Elsevier B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/34182]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | H. Du,J. Q. Xiao,Y. S. Zou,et al. Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band[J]. Optical Materials,2006,28(8-9):944-949. |
| APA | H. Du.,J. Q. Xiao.,Y. S. Zou.,T. G. Wang.,J. Gong.,...&L. S. Wen.(2006).Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band.Optical Materials,28(8-9),944-949. |
| MLA | H. Du,et al."Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band".Optical Materials 28.8-9(2006):944-949. |
入库方式： OAI收割
来源：金属研究所
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