Effect of partial pressure of reactive gas on chromium nitride and chromium oxide deposited by arc ion plating
文献类型：期刊论文
| 作者 | M. S. Li ; C. J. Feng ; F. H. Wang |
| 刊名 | Transactions of Nonferrous Metals Society of China
 |
| 出版日期 | 2006 |
| 卷号 | 16页码:S276-S279 |
| 关键词 | chromium nitride chromium oxide arc ion plating reactive gas partial pressure crn coatings films |
| ISSN号 | 1003-6326 |
| 中文摘要 | The effects of reactive gas partial pressure on droplet formation, deposition rate and change of preferred orientation of CrN and Cr2O3 coatings were studied. For CrN coatings, as nitrogen partial pressure increases, the number and size of droplets increases, the deposition rate initially increases obviously and then slowly, and the preferred orientation of CrN changes from high-index plane to low-index one. For Cr2O3 Coatings, with the increase of oxygen partial pressure, the number and size of droplets decreases, the deposition rate decreases and the (300) becomes the preferred orientation. These differences are ascribed to the formation of CrN (with a lower melting point) and Cr2O3 (with a higher melting point) on the surface of Cr target during the deposition of CrN and Cr2O3. Complete coatings CrN or Cr2O3 film can be formed when reactive gas partial pressure gets up to 0.1 Pa. The optimized N-2 partial pressure for CrN deposition is about 0.1-0.2 Pa in order to suppress the formation of droplets and the suitable O-2 partial pressure for Cr2O3 deposition is approximately 0.1 Pa for the attempt to prevent the peel of the coating. |
| 原文出处 | |
| 公开日期 | 2012-04-13 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/34307]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | M. S. Li,C. J. Feng,F. H. Wang. Effect of partial pressure of reactive gas on chromium nitride and chromium oxide deposited by arc ion plating[J]. Transactions of Nonferrous Metals Society of China,2006,16:S276-S279. |
| APA | M. S. Li,C. J. Feng,&F. H. Wang.(2006).Effect of partial pressure of reactive gas on chromium nitride and chromium oxide deposited by arc ion plating.Transactions of Nonferrous Metals Society of China,16,S276-S279. |
| MLA | M. S. Li,et al."Effect of partial pressure of reactive gas on chromium nitride and chromium oxide deposited by arc ion plating".Transactions of Nonferrous Metals Society of China 16(2006):S276-S279. |
入库方式： OAI收割
来源：金属研究所
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