Change of sheet resistance of high purity alumina ceramics implanted by Cu and Ti ions
文献类型：期刊论文
| 作者 | D. X. Li ; J. Z. Zhang ; M. Yu ; J. C. Kang ; W. Z. Li |
| 刊名 | Applied Surface Science
 |
| 出版日期 | 2005 |
| 卷号 | 252期号:4页码:1029-1034 |
| 关键词 | 99% Al2O3 ion implantation copper and titanium ions sheet resistance nitride films behavior crystals |
| ISSN号 | 0169-4332 |
| 中文摘要 | High purity alumina ceramics (99% Al2O3) was implanted by copper ion and titanium ion in a metal vapour vacuum arc (MEVVA) implanter, respectively. The influence of implantation parameters was studied varying ion fluence. The samples were implanted by 68 keV Cu ion and 82 keV Ti ion with fluences from 1 X 10(15) to 1 x 10(18) ions/cm(2), respectively. The as-implanted samples were investigated by scanning electron microscopy (SEM), glancing X-ray diffraction (GXRD), scanning Auger microscopy (SAM), and four-probe method. Different morphologies were observed on the surfaces of the as-implanted samples and clearly related to implantation parameters. For both ion implantations, the sheet resistances of the alumina samples implanted with Cu and Ti ion fluences of 1 x 10(18) ions/cm(2), respectively, reached the corresponding minimum values because of the surface metallization. The experimental results indicate that the high-fluence ion implantation resulted in conductive layer on the surface of the as-implanted high purity alumina ceramics. (c) 2005 Elsevier B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/34898]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | D. X. Li,J. Z. Zhang,M. Yu,et al. Change of sheet resistance of high purity alumina ceramics implanted by Cu and Ti ions[J]. Applied Surface Science,2005,252(4):1029-1034. |
| APA | D. X. Li,J. Z. Zhang,M. Yu,J. C. Kang,&W. Z. Li.(2005).Change of sheet resistance of high purity alumina ceramics implanted by Cu and Ti ions.Applied Surface Science,252(4),1029-1034. |
| MLA | D. X. Li,et al."Change of sheet resistance of high purity alumina ceramics implanted by Cu and Ti ions".Applied Surface Science 252.4(2005):1029-1034. |
入库方式： OAI收割
来源：金属研究所
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