中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test

文献类型:期刊论文

作者M. Qin ; V. Ji ; Y. N. Wu ; C. R. Chen ; J. B. Li
刊名Surface & Coatings Technology
出版日期2005
卷号192期号:2-3页码:139-144
关键词proof stress strain-hardening exponent biaxial stresses Cu film TiN film tensile test in-situ X-ray diffraction alloy
ISSN号0257-8972
中文摘要A new method is put forward to measure the proof stress and strain-hardening exponent of polycrystalline films (Cu, TiN) under a biaxial residual stresses state on the substrates. The Cu and TiN films were deposited on the steel substrates by ion beam-assisted magnetron sputtering and plasma-assisted chemical vapor deposition (PACVD), respectively. During the tensile test, the longitudinal stress (sigma(1)) and transverse stress (sigma(2)) of the films were determined by in-situ X-ray diffraction, and the applied strain (epsilon(a)) of the films were measured by a strain gauge. Based on the experimental results, the equivalent stresses sigma and equivalent uniaxial strains epsilon(t) can be obtained. From the sigma-epsilon(t) curves, the proof stresses sigma(0.1) of the Cu and TiN films have been calculated. The results indicate that the values of sigma(0.1) of the Cu and TiN films are 328 MPa and 4.2 GPa, respectively, and the values of the strain-hardening exponents for them are 0.62 and 0.36, respectively. In addition, evidence that the plastic flow of TiN film occurred under the tensile load is also obtained. (C) 2004 Published by Elsevier B.V.
原文出处://WOS:000226842700002
公开日期2012-04-14
源URL[http://ir.imr.ac.cn/handle/321006/35007]  
专题金属研究所_中国科学院金属研究所
推荐引用方式
GB/T 7714
M. Qin,V. Ji,Y. N. Wu,et al. Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test[J]. Surface & Coatings Technology,2005,192(2-3):139-144.
APA M. Qin,V. Ji,Y. N. Wu,C. R. Chen,&J. B. Li.(2005).Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test.Surface & Coatings Technology,192(2-3),139-144.
MLA M. Qin,et al."Determination of proof stress and strain-hardening exponent for thin film with biaxial residual stresses by in-situ XRD stress analysis combined with tensile test".Surface & Coatings Technology 192.2-3(2005):139-144.

入库方式: OAI收割

来源:金属研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。