Experimental verification of the physical model for droplet-particles cleaning in pulsed bias arc ion plating
文献类型：期刊论文
| 作者 | Y. H. Zhao ; G. Q. Lin ; C. Dong ; L. S. Wen |
| 刊名 | Journal of Materials Science & Technology
 |
| 出版日期 | 2005 |
| 卷号 | 21期号:3页码:423-426 |
| 关键词 | arc ion plating pulsed bias TiN film droplet-particles tin deposition mechanism coatings voltage |
| ISSN号 | 1005-0302 |
| 中文摘要 | It has been reported that application of pulsed biases in arc ion plating could effectively eliminate droplet particles. The present paper aims at experimental verification of a physical model proposed previously by us which is based on particle charging and repulsion in the pulsed plasma sheath. An orthogonal experiment was designed for this purpose, using the electrical parameters of the pulsed bias for the deposition of TiN films on stainless steel substrates. The effect of these parameters on the amount and the size distribution of the particles were analyzed, and the results provided sufficient evidence for the physical model. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/35272]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Y. H. Zhao,G. Q. Lin,C. Dong,et al. Experimental verification of the physical model for droplet-particles cleaning in pulsed bias arc ion plating[J]. Journal of Materials Science & Technology,2005,21(3):423-426. |
| APA | Y. H. Zhao,G. Q. Lin,C. Dong,&L. S. Wen.(2005).Experimental verification of the physical model for droplet-particles cleaning in pulsed bias arc ion plating.Journal of Materials Science & Technology,21(3),423-426. |
| MLA | Y. H. Zhao,et al."Experimental verification of the physical model for droplet-particles cleaning in pulsed bias arc ion plating".Journal of Materials Science & Technology 21.3(2005):423-426. |
入库方式： OAI收割
来源：金属研究所
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