Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering
文献类型：期刊论文
| 作者 | H. T. Cao ; Z. L. Pei ; J. Gong ; C. Sun ; R. F. Huang ; L. S. Wen |
| 刊名 | Surface & Coatings Technology
 |
| 出版日期 | 2004 |
| 卷号 | 184期号:1页码:84-92 |
| 关键词 | DC reactive magnetron sputtering transparent conductive oxide electro-optical properties structural properties zinc-oxide electrical-properties devices stress rf |
| ISSN号 | 0257-8972 |
| 中文摘要 | ZnO films doped with Al and Mn have been prepared by DC reactive magnetron sputtering at room temperature. The electro-optical, structural properties and compositional analysis of the films have been investigated using Hall-effect measurement, optical spectroscopy, X-ray diffraction, atomic force microscope and Auger electron spectroscopy. A minimum resistivity of 3.46 x 10(-4) Omega cm and more than 80.0% transmittance at 550 nrn have been obtained. It has been observed that the percentages of Al and Mn in the films were slightly lower than that of Al and Mn mixed in the targets. It has been found that all deposited films, which contains compressive stress, have c-axis preferred orientation perpendicular to the substrate with flat and smooth surface (root-mean-square surface roughness is of the order of similar to 3 nm over 5 x 5 mum(2)). In-grain scattering has been suggested to be the most probable scattering mechanism for the films (N> 10(20) cm(-3)) at room temperature. (C) 2003 Elsevier B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/35313]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | H. T. Cao,Z. L. Pei,J. Gong,et al. Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering[J]. Surface & Coatings Technology,2004,184(1):84-92. |
| APA | H. T. Cao,Z. L. Pei,J. Gong,C. Sun,R. F. Huang,&L. S. Wen.(2004).Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering.Surface & Coatings Technology,184(1),84-92. |
| MLA | H. T. Cao,et al."Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering".Surface & Coatings Technology 184.1(2004):84-92. |
入库方式： OAI收割
来源：金属研究所
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