Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films
文献类型：期刊论文
| 作者 | H. T. Cao ; Z. L. Pei ; J. Gong ; C. Sun ; R. F. Huang ; L. S. Wen |
| 刊名 | Journal of Solid State Chemistry
 |
| 出版日期 | 2004 |
| 卷号 | 177期号:4-5页码:1480-1487 |
| 关键词 | DC reactive niagnetron sputtering transparent conducting oxide electro-optical properties XPS structural properties zinc-oxide highly transparent semiconductors |
| ISSN号 | 0022-4596 |
| 中文摘要 | This paper presents the electro-optical, chemical and structural properties of doped-ZnO films deposited by DC-reactive magnetron sputtering at room temperature using the bi-dopant Al and Mn. A minimum resistivity of 3.46 x 10(-4) Omegacm, exceeding 75.0% average transmittance (380-800nm), and fundamental band gap of 3.48 +/- 0.01 eV have been obtained. XPS analyses show that Zn uniformly remains in the valence state of Zn2+; all of the Al and a little amount of Mn with valence state of Mn4+ are supposed to have donor effect, while dominant Mn2+ will induce to form more oxygen vacancies and this proposal has been verified by O 1s XPS results. It has been concluded that the presence of more oxygen vacancies will attenuate the effect of hybridization of p-d orbitals in the matrix of ZnO. It has been found that all the as-deposited films have c-axis preferred orientation with flat and smooth surface (RMS surface roughness is of the order of similar to 3 nm over 5 x 5 mum(2) area). (C) 2003 Elsevier Inc. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/35314]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | H. T. Cao,Z. L. Pei,J. Gong,et al. Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films[J]. Journal of Solid State Chemistry,2004,177(4-5):1480-1487. |
| APA | H. T. Cao,Z. L. Pei,J. Gong,C. Sun,R. F. Huang,&L. S. Wen.(2004).Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films.Journal of Solid State Chemistry,177(4-5),1480-1487. |
| MLA | H. T. Cao,et al."Preparation and characterization of Al and Mn doped ZnO (ZnO : (Al, Mn)) transparent conducting oxide films".Journal of Solid State Chemistry 177.4-5(2004):1480-1487. |
入库方式： OAI收割
来源：金属研究所
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