Microstructures and mechanical properties of chromium oxide films by arc ion plating
文献类型：期刊论文
| 作者 | A. L. Ji ; W. Wang ; G. H. Song ; Q. M. Wang ; C. Sun ; L. S. Wen |
| 刊名 | Materials Letters
 |
| 出版日期 | 2004 |
| 卷号 | 58期号:14页码:1993-1998 |
| 关键词 | Cr2O3 films arc ion plating microstructure mechanical properties chemical-vapor-deposition optical-properties tin films coatings |
| ISSN号 | 0167-577X |
| 中文摘要 | Chromium oxide (Cr2O3) films were deposited on stainless steel substrate by arc ion plating (AIP) technique. The results show that the flow rate of oxygen and bias voltage affected the microstructure, surface morphology and chemical composition of Cr2O3 films. The hardness of stoichiometric Cr2O3 film obtained at flow oxygen rate of 130 sccm and a bias voltage of -200 V reaches a maximum value of 36 GPa, much higher than that of films obtained by other deposition methods. (C) 2004 Elsevier B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/35385]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | A. L. Ji,W. Wang,G. H. Song,et al. Microstructures and mechanical properties of chromium oxide films by arc ion plating[J]. Materials Letters,2004,58(14):1993-1998. |
| APA | A. L. Ji,W. Wang,G. H. Song,Q. M. Wang,C. Sun,&L. S. Wen.(2004).Microstructures and mechanical properties of chromium oxide films by arc ion plating.Materials Letters,58(14),1993-1998. |
| MLA | A. L. Ji,et al."Microstructures and mechanical properties of chromium oxide films by arc ion plating".Materials Letters 58.14(2004):1993-1998. |
入库方式： OAI收割
来源：金属研究所
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