A study of AlN films prepared by arc ion plating
文献类型：期刊论文
| 作者 | M. D. Huang ; C. Y. Lu ; B. Wang ; C. Sun ; R. F. Huang ; L. S. Wen ; G. Q. Lin ; C. Dong |
| 刊名 | Journal of Materials Science & Technology
 |
| 出版日期 | 2003 |
| 卷号 | 19期号:1页码:27-29 |
| 关键词 | AlN AIP preferential orientation bias thin-films deposition |
| ISSN号 | 1005-0302 |
| 中文摘要 | Hexagonal AIN films have been obtained by arc ion plating at different negative biases. X-ray diffraction and scanning electron microscopy results show that AIN films with smooth surfaces and (002) preferred orientation are obtained at low biases, whereas those with coarse surfaces and (100) preferred orientation are obtained at high biases. The formation mechanism of AIN is analyzed and the experiment results are discussed. The effect of bias on adhesion strength has also been examined. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/35859]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | M. D. Huang,C. Y. Lu,B. Wang,et al. A study of AlN films prepared by arc ion plating[J]. Journal of Materials Science & Technology,2003,19(1):27-29. |
| APA | M. D. Huang.,C. Y. Lu.,B. Wang.,C. Sun.,R. F. Huang.,...&C. Dong.(2003).A study of AlN films prepared by arc ion plating.Journal of Materials Science & Technology,19(1),27-29. |
| MLA | M. D. Huang,et al."A study of AlN films prepared by arc ion plating".Journal of Materials Science & Technology 19.1(2003):27-29. |
入库方式： OAI收割
来源：金属研究所
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