Microstructural study on multilayer FeTaN/TaN (5) films
文献类型：期刊论文
| 作者 | Q. Zhan ; R. Yu ; L. L. He ; D. X. Li ; H. B. Nie ; C. Ong |
| 刊名 | Materials Letters
 |
| 出版日期 | 2003 |
| 卷号 | 57期号:24-25页码:3904-3909 |
| 关键词 | microstructure thin films magnetic materials transmission electron microscopy (TEM) sputtering fetan thin-films magnetic-properties recording-heads tantalum nitride temperature |
| ISSN号 | 0167-577X |
| 中文摘要 | The microstructure of [FeTaN/TaN](5) multilayer films has been investigated by transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) in cross section and plan view. Each layer shows a small surface roughening less than 1 nm. The FeTaN layers are composed of b.c.c. Fe with Ta incorporated substitutionally and N interstitially, denoted as Fe(Ta,N); while the TaN layers mainly consist of f.c.c. TaN phase. A [110] texture of Fe(Ta,N) has been formed in the FeTaN layers. The columnar grain structure is a typical feature in FeTaN layers. (C) 2003 Elsevier Science B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/36145]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Q. Zhan,R. Yu,L. L. He,et al. Microstructural study on multilayer FeTaN/TaN (5) films[J]. Materials Letters,2003,57(24-25):3904-3909. |
| APA | Q. Zhan,R. Yu,L. L. He,D. X. Li,H. B. Nie,&C. Ong.(2003).Microstructural study on multilayer FeTaN/TaN (5) films.Materials Letters,57(24-25),3904-3909. |
| MLA | Q. Zhan,et al."Microstructural study on multilayer FeTaN/TaN (5) films".Materials Letters 57.24-25(2003):3904-3909. |
入库方式： OAI收割
来源：金属研究所
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