Piezoelectric coefficient measurement of piezoelectric thin films: an overview
文献类型：期刊论文
| 作者 | J. M. Liu ; B. Pan ; H. L. W. Chan ; S. N. Zhu ; Y. Y. Zhu ; Z. G. Liu |
| 刊名 | Materials Chemistry and Physics
 |
| 出版日期 | 2002 |
| 卷号 | 75期号:1-3页码:41261 |
| 关键词 | piezoelectric coefficient piezoelectric thin films interferometer |
| ISSN号 | 0254-0584 |
| 中文摘要 | An overview on the state-of-art piezoelectric measurements of thin films is given. The principles and advantages/disadvantages of the conventional techniques are discussed for piezoelectric applications. Concerning a direct measurement of piezoelectric coefficient and taking into account of 1.0-100.0 mum in film thickness, a displacement of 0.1 nm cannot be reliably detected by utilizing the reverse piezoelectric effect, unless the probe's resolution reaches up to 10(-3) nm. The sensitivity of charge-integrator cannot be worse than similar to0.1 nC, typically. Such a high resolution in terms of displacement and charge may not be always reachable if the measurement is not carefully calibrated and manipulated. New demands on the techniques have been placed and a more careful selection of the techniques to be used is required. (C) 2002 Elsevier Science B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/36347]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | J. M. Liu,B. Pan,H. L. W. Chan,et al. Piezoelectric coefficient measurement of piezoelectric thin films: an overview[J]. Materials Chemistry and Physics,2002,75(1-3):41261. |
| APA | J. M. Liu,B. Pan,H. L. W. Chan,S. N. Zhu,Y. Y. Zhu,&Z. G. Liu.(2002).Piezoelectric coefficient measurement of piezoelectric thin films: an overview.Materials Chemistry and Physics,75(1-3),41261. |
| MLA | J. M. Liu,et al."Piezoelectric coefficient measurement of piezoelectric thin films: an overview".Materials Chemistry and Physics 75.1-3(2002):41261. |
入库方式： OAI收割
来源：金属研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。