中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Piezoelectric coefficient measurement of piezoelectric thin films: an overview

文献类型:期刊论文

作者J. M. Liu ; B. Pan ; H. L. W. Chan ; S. N. Zhu ; Y. Y. Zhu ; Z. G. Liu
刊名Materials Chemistry and Physics
出版日期2002
卷号75期号:1-3页码:41261
关键词piezoelectric coefficient piezoelectric thin films interferometer
ISSN号0254-0584
中文摘要An overview on the state-of-art piezoelectric measurements of thin films is given. The principles and advantages/disadvantages of the conventional techniques are discussed for piezoelectric applications. Concerning a direct measurement of piezoelectric coefficient and taking into account of 1.0-100.0 mum in film thickness, a displacement of 0.1 nm cannot be reliably detected by utilizing the reverse piezoelectric effect, unless the probe's resolution reaches up to 10(-3) nm. The sensitivity of charge-integrator cannot be worse than similar to0.1 nC, typically. Such a high resolution in terms of displacement and charge may not be always reachable if the measurement is not carefully calibrated and manipulated. New demands on the techniques have been placed and a more careful selection of the techniques to be used is required. (C) 2002 Elsevier Science B.V. All rights reserved.
原文出处://WOS:000174897700004
公开日期2012-04-14
源URL[http://ir.imr.ac.cn/handle/321006/36347]  
专题金属研究所_中国科学院金属研究所
推荐引用方式
GB/T 7714
J. M. Liu,B. Pan,H. L. W. Chan,et al. Piezoelectric coefficient measurement of piezoelectric thin films: an overview[J]. Materials Chemistry and Physics,2002,75(1-3):41261.
APA J. M. Liu,B. Pan,H. L. W. Chan,S. N. Zhu,Y. Y. Zhu,&Z. G. Liu.(2002).Piezoelectric coefficient measurement of piezoelectric thin films: an overview.Materials Chemistry and Physics,75(1-3),41261.
MLA J. M. Liu,et al."Piezoelectric coefficient measurement of piezoelectric thin films: an overview".Materials Chemistry and Physics 75.1-3(2002):41261.

入库方式: OAI收割

来源:金属研究所

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