ZAO: an attractive potential substitute for ITO in flat display panels
文献类型：期刊论文
| 作者 | M. Chen ; Z. L. Pei ; C. Sun ; J. Gong ; R. F. Huang ; L. S. Wen |
| 刊名 | Materials Science and Engineering B-Solid State Materials for Advanced Technology
 |
| 出版日期 | 2001 |
| 卷号 | 85期号:2-3页码:212-217 |
| 关键词 | transparent conducting films ZAO reactive magnetron sputtering tin oxide-films sn-doped in2o3 optical-properties electrical-properties indium oxide evaporated indium thin-films zno films al rf |
| ISSN号 | 0921-5107 |
| 中文摘要 | Al-doped ZnO (ZAO) is an attractive material, as it is cheap and abundant, it is nontoxic, has comparable electrical, optical and infrared (I-R) properties to ITO, is cost-effective and is easy to fabricate. In this paper, ZAO films have been prepared by reactive magnetron sputtering. Their electrical conductivity is shown to be in the region of 10(-4) Omega cm. The influence of the substrate-to-target distance and deposition temperature on the resistivity of ZAO films has been studied. Their IR and optical properties have been investigated with UV-VIS and Fourier transformation IR spectrometry. It was shown that the visible transmittance and IR reflectance of ZAO films deposited on polyester at room temperature are comparable to those of ITO films. ZAO films have n-type conductivity. It was found that by adding Al to ZnO the variation in resistivity of ZAO films was decreased, and was usually no more than 1% at 50-400 degreesC in vacuum and 5% at 50-400 degreesC in air. (C) 2001 Elsevier Science B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/36605]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | M. Chen,Z. L. Pei,C. Sun,et al. ZAO: an attractive potential substitute for ITO in flat display panels[J]. Materials Science and Engineering B-Solid State Materials for Advanced Technology,2001,85(2-3):212-217. |
| APA | M. Chen,Z. L. Pei,C. Sun,J. Gong,R. F. Huang,&L. S. Wen.(2001).ZAO: an attractive potential substitute for ITO in flat display panels.Materials Science and Engineering B-Solid State Materials for Advanced Technology,85(2-3),212-217. |
| MLA | M. Chen,et al."ZAO: an attractive potential substitute for ITO in flat display panels".Materials Science and Engineering B-Solid State Materials for Advanced Technology 85.2-3(2001):212-217. |
入库方式： OAI收割
来源：金属研究所
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