Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering
文献类型：期刊论文
| 作者 | M. Chen ; Z. L. Pei ; X. Wang ; C. Sun ; L. S. Wen |
| 刊名 | Materials Letters
 |
| 出版日期 | 2001 |
| 卷号 | 48期号:3-4页码:137-143 |
| 关键词 | Al-doped ZnO (ZAO) polyester mechanical IR reflectance thin-films optical-properties oxide-films electrical-properties rf temperature orientation parameters deposition substrate |
| ISSN号 | 0167-577X |
| 中文摘要 | High preferred (002) orientation Al-doped ZnO (ZAO) films have been prepared by de magnetron reactive sputtering of an alloy target (98.5 wt.% Zn-1.5 wt.% Al) onto polyester substrates. The structural, mechanical, electrical and optical properties were investigated. The ZAO film has a sheet resistance of as low as 47.5 Omega/square and an average visible transmittance of about 70%. An average IR reflectance of about 70% in the region of 2.5-25 mum also has been obtained. (C) 2001 Elsevier Science B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/36608]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | M. Chen,Z. L. Pei,X. Wang,et al. Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering[J]. Materials Letters,2001,48(3-4):137-143. |
| APA | M. Chen,Z. L. Pei,X. Wang,C. Sun,&L. S. Wen.(2001).Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering.Materials Letters,48(3-4),137-143. |
| MLA | M. Chen,et al."Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering".Materials Letters 48.3-4(2001):137-143. |
入库方式： OAI收割
来源：金属研究所
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