中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Intrinsic limit of electrical properties of transparent conductive oxide films

文献类型:期刊论文

作者M. Chen ; Z. L. Pei ; X. Wang ; Y. H. Yu ; X. H. Liu ; C. Sun ; L. S. Wen
刊名Journal of Physics D-Applied Physics
出版日期2000
卷号33期号:20页码:2538-2548
关键词doped in2o3 films dominant scattering mechanisms amorphous indium oxide optical-properties thin-films zno films structural-properties reactive evaporation physical-properties spray-pyrolysis
ISSN号0022-3727
中文摘要Contributions of acoustical deformation scattering, ion impurity scattering and grain boundary potential scattering to the conductivity of TCO films have been calculated in order to deduce the intrinsic limit of conductivity of TCO films regardless of precise details of the preparation procedure. The results indicate that the effective mass of charge carriers has a strong dependence on carrier concentration. Based on the effective mass correction, as well as the carrier concentration ionized impurity centre correction, scattering due to ion impurity has been developed to explain the upper limit of mobility or the lower limit of resistivity of TCO films. Two empirical expressions are introduced to depict the dependence of the upper limit of mobility and the lower limit of resistivity of TCO films on carrier concentration. The dependence of transparency on carrier concentration is also discussed.
原文出处://WOS:000165099900007
公开日期2012-04-14
源URL[http://ir.imr.ac.cn/handle/321006/36994]  
专题金属研究所_中国科学院金属研究所
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M. Chen,Z. L. Pei,X. Wang,et al. Intrinsic limit of electrical properties of transparent conductive oxide films[J]. Journal of Physics D-Applied Physics,2000,33(20):2538-2548.
APA M. Chen.,Z. L. Pei.,X. Wang.,Y. H. Yu.,X. H. Liu.,...&L. S. Wen.(2000).Intrinsic limit of electrical properties of transparent conductive oxide films.Journal of Physics D-Applied Physics,33(20),2538-2548.
MLA M. Chen,et al."Intrinsic limit of electrical properties of transparent conductive oxide films".Journal of Physics D-Applied Physics 33.20(2000):2538-2548.

入库方式: OAI收割

来源:金属研究所

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