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X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films
文献类型：期刊论文
| 作者 | M. Chen ; X. Wang ; Y. H. Yu ; Z. L. Pei ; X. D. Bai ; C. Sun ; R. F. Huang ; L. S. Wen |
| 刊名 | Applied Surface Science
 |
| 出版日期 | 2000 |
| 卷号 | 158期号:1-2页码:134-140 |
| 关键词 | Al-doped ZnO (ZAO) XPS Al oxygen transition zone oxide thin-films transparent growth rf |
| ISSN号 | 0169-4332 |
| 中文摘要 | The chemical state of oxygen, aluminum and zinc in Al-doped ZnO (ZAO) films was investigated by X-ray photoelectron spectroscopy (XPS), as well as the transition zone of the film-to-substrate, by auger electron spectroscopy (AES). The results show that zinc remains mostly in the formal valence states of Zn2+. A distinct asymmetry in Al 2p(3/2) photoelectron peaks has been resolved into two components, one is metallic Al and the other is oxidized Al. The depth profile of the two components revealed that metallic Al mainly exists in the thin surface layer. The close inspection of Ols shows that Ols is composed of three components, centered at 530.15 +/- 0.15, 531.25 +/- 0.20 and 532.40 +/- 0.15 eV, respectively. AES reveals an abrupt transition zone between the ZAO and quartz substrate. (C) 2000 Elsevier Science B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/36995]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | M. Chen,X. Wang,Y. H. Yu,et al. X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films[J]. Applied Surface Science,2000,158(1-2):134-140. |
| APA | M. Chen.,X. Wang.,Y. H. Yu.,Z. L. Pei.,X. D. Bai.,...&L. S. Wen.(2000).X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films.Applied Surface Science,158(1-2),134-140. |
| MLA | M. Chen,et al."X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films".Applied Surface Science 158.1-2(2000):134-140. |
入库方式： OAI收割
来源：金属研究所
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