Precipitation and crystallization of nanometer Si clusters in annealed Si-rich SiO2 films
文献类型：期刊论文
| 作者 | L. P. You ; C. L. Heng ; S. Y. Ma ; Z. C. Ma ; W. H. Zong ; Z. L. Wu ; G. G. Win |
| 刊名 | Journal of Crystal Growth
 |
| 出版日期 | 2000 |
| 卷号 | 212期号:1-2页码:109-114 |
| ISSN号 | 0022-0248 |
| 关键词 | Si-rich SiO2 Si nanocrystallites high-resolution transmission electron microscopy visible luminescence optical-properties ion-implantation photoluminescence nanocrystals sio2-films confinement |
| 中文摘要 | Si-rich SiO2 films with three different degrees of Si-richness were deposited by RF magnetron sputtering using Si-SiO2 composite targets. X-ray photoelectron spectroscopy measurements indicate that Si clusters were present in the as-deposited films. The precipitation and crystallization of nanometer Si clusters in SiO2 films annealed at high temperatures have been studied using high-resolution transmission electron microscopy and electron diffraction. Si nanocrystallites were observed in the sample deposited using a Si-SiO2 composite target having a 30% area of Si and which had been annealed at 900 degrees C. The average size and density of Si nanocrystallites in the films increased notably as the annealing temperature was increased from 900 to 1100 degrees C, Thus, using a 1100 degrees C anneal and increasing the area percentage of Si in the composite target from 20 to 30%, the average size of Si nanocrystallites increased about 15%, and the density of Si nanocrystallites increased by a factor of about 2.5. (C) 2000 Elsevier Science B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2012-04-14 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/37229]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | L. P. You,C. L. Heng,S. Y. Ma,et al. Precipitation and crystallization of nanometer Si clusters in annealed Si-rich SiO2 films[J]. Journal of Crystal Growth,2000,212(1-2):109-114. |
| APA | L. P. You.,C. L. Heng.,S. Y. Ma.,Z. C. Ma.,W. H. Zong.,...&G. G. Win.(2000).Precipitation and crystallization of nanometer Si clusters in annealed Si-rich SiO2 films.Journal of Crystal Growth,212(1-2),109-114. |
| MLA | L. P. You,et al."Precipitation and crystallization of nanometer Si clusters in annealed Si-rich SiO2 films".Journal of Crystal Growth 212.1-2(2000):109-114. |
入库方式： OAI收割
来源：金属研究所
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